Class One wet Process Systems
SOLSTICE S4
Automated Electroplating Systems
Advanced, single-wafer, high-throughput ECD and Surface Preparation – with up to four chambers
SOLSTICE S8
Automated Electroplating Systems
Advanced, single-wafer, high-throughput ECD and Surface Preparation – with up to eight chambers
SOLSTICE LT
Electroplating Development Systems
Semi-automated single-wafer Process
Development – with up to three chambers
TRIDENT SST
Advanced Spray Solvent Tools
For semiconductor batch processing
TRIDENT SRD
Advanced Spin Rinse Dryers
For semiconductor batch processing