Class One wet Process Systems

SOLSTICE S4
 

Automated Electroplating Systems

Advanced, single-wafer, high-throughput ECD and Surface Preparation – with up to four chambers

SOLSTICE S8

 

Automated Electroplating Systems

Advanced, single-wafer, high-throughput ECD and Surface Preparation – with up to eight chambers

SOLSTICE LT

 

Electroplating Development Systems

Semi-automated single-wafer Process
Development – with up to three chambers

TRIDENT SST

 

Advanced Spray Solvent Tools

For semiconductor batch processing

TRIDENT SRD


 

Advanced Spin Rinse Dryers

For semiconductor batch processing